The Gunners' £42.5 million record transfer received a knock in the closing stages of Germany's 5-3 win over Sweden, although the injury is considered minor and the German Football Association was not aware of any major issues before he flew direct back to London.
Ozil, who turned 25 on Tuesday, will return to Arsenal's London Colney training base on Thursday for assessment, when it is hoped further tests will confirm no lasting problems as Arsène Wenger's side resume their domestic campaign.
Özil has enjoyed a brilliant start with Arsenal
Fellow midfield playmaker Santi Cazorla should be involved again for the first time since the win over Tottenham on 1 September 1 following his recovery from an ankle problem. England forward Theo Walcott, who has been sidelined after a minor abdominal procedure, could also come back into Wenger's thinking, although next week's Champions League tie with Borussia Dortmund is perhaps a more likely return date.
One player who has declared himself fit following the international action is goalkeeper Wojciech Szczesny, who produced a couple of good saves in Poland's 2-0 defeat at Wembley which saw England qualify for the World Cup finals.
Szczesny stood in for Artur Boruc, who had a muscular problem, and there was a short moment of concern when the Arsenal keeper held his arm following a collision with Manchester United forward Danny Welbeck.
Özil vs Sweden
However, the 23-year-old Pole said: "He just stood on my hand, but it was nothing seriuos."
Szczesny feels Arsenal can sustain their positive form to last the distance in the race for some long-overdue silverware in 2014.
He said: "I hope we (Arsenal) can keep going the way we have in the past few weeks and will give ourselves the best chance to challenge for a trophy."